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Surface texture investigation of ultra-precision optical components

: Schröder, S.; Ratteit, J.; Gliech, S.; Duparre, A.


Duparre, A. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Advanced characterization techniques for optics, semiconductors, and nanotechnologies II : 2 - 4 August 2005, San Diego, California, USA
Bellingham/Wash.: SPIE, 2005 (SPIE Proceedings Series 5878)
ISBN: 0-8194-5883-X
Conference "Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies" <2, 2005, San Diego/Calif.>
Fraunhofer IOF ()
light scattering; total scattering; angle resolved scattering; defect; multilayer; coating

To meet the ever increasing requirements for high quality optical surfaces, components and systems, high-sensitive and flexible analysis of optical losses, nano-roughness and defects is necessary. In this paper, we present the set-ups developed at the Fraunhofer Institute in Jena for total and angle resolved scattering measurements from the VUV and VIS up to the IR spectral regions. Examples are presented for light scattering investigations of the texture of ultraprecision mirrors produced by diamond turning. Experiments are described which were carried out to test the possibilities for nano- and micro defect detection using these set-ups. Furthermore, the relationship between the scattering properties of dielectric multilayer mirrors and their interface texture is discussed for highly reflective DUV mirrors.