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Mechanical reliability of MEMS fabricated by a special technology using standard silicon wafers
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2003
Conference Paper
Titel
Mechanical reliability of MEMS fabricated by a special technology using standard silicon wafers
Author(s)
Lohmann, C.
Bertz, A.
Küchler, M.
Reuter, D.
Gessner, T.
Hauptwerk
Reliability, testing, and characterization of MEMS/MOEMS
Konferenz
Reliability, Testing, and Characterization of MEMS/MOEMS Conference 2003
Micromachining and Microfabrication Symposium 2003
DOI
10.1117/12.472725
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM