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Mechanical reliability of MEMS fabricated by a special technology using standard silicon wafers

 
: Lohmann, C.; Bertz, A.; Küchler, M.; Reuter, D.; Gessner, T.

:

Ramesham, R. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Reliability, testing, and characterization of MEMS/MOEMS : 27 - 29 January 2003, San Jose, California, USA; conference, part of the Micromachining and Microfabrication Symposium at SPIE's Photonics West 2003, January 25 - 31, 2003
Bellingham/Wash.: SPIE, 2003 (SPIE Proceedings Series 4980)
ISBN: 0-8194-4780-3
S.200-207
Reliability, Testing, and Characterization of MEMS/MOEMS Conference <2003, San Jose/Calif.>
Micromachining and Microfabrication Symposium <2003, San Jose/Calif.>
Englisch
Konferenzbeitrag
Fraunhofer IZM ()
Fraunhofer ENAS ()