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A novel high aspect ratio technology for MEMS fabrication using standard silicon wafers

 
: Lohmann, C.; Bertz, A.; Küchler, M.; Gessner, T.

:

Valldorf, J.:
Advanced microsystems for automotive applications 2003 : Presented at the 7th International Conference on Advanced Microsystems for Automotive Applications held on May 22 - 23, 2003 in Berlin
Berlin: Springer, 2003 (Engineering online library)
ISBN: 3-540-00597-8
S.59-66
International Conference on Advanced Microsystems for Automotive Applications <7, 2003, Berlin>
Englisch
Konferenzbeitrag
Fraunhofer IZM ()
Fraunhofer ENAS ()

: http://publica.fraunhofer.de/dokumente/N-39481.html