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A novel high aspect ratio technology for MEMS fabrication using standard silicon wafers
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2003
Conference Paper
Titel
A novel high aspect ratio technology for MEMS fabrication using standard silicon wafers
Author(s)
Lohmann, C.
Bertz, A.
Küchler, M.
Gessner, T.
Hauptwerk
Advanced microsystems for automotive applications 2003
Konferenz
International Conference on Advanced Microsystems for Automotive Applications 2003
DOI
10.1007/978-3-540-76988-0_6
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM