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Spatially resolved scatter measurement of diffractive micromirror arrays

 
: Sicker, Cornelius; Heber, Jörg; Berndt, Dirk

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Volltext urn:nbn:de:0011-n-3939571 (1.2 MByte PDF)
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This paper was published by OSA and is made available as an electronic reprint with the permission of OSA. The paper can be found on the OSA website. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.
Erstellt am: 17.6.2016


Applied optics 55 (2016), Nr.16, S.4467-4477
ISSN: 0003-6935
ISSN: 1539-4522
ISSN: 1559-128X
Englisch
Zeitschriftenaufsatz, Elektronische Publikation
Fraunhofer IPMS ()

Abstract
Spatial light modulators (SLMs) support flexible system concepts in modern optics and especially phase-only SLMs such as micromirror arrays (MMAs) appear attractive for many applications. In order to achieve a precise phase modulation, which is crucial for optical performance, careful characterization and calibration of SLM devices is required. We examine an intensity-based measurement concept, which promises distinct advantages by means of a spatially resolved scatter measurement that is combined with the MMA’s diffractive principle. Measurements yield quantitative results, which are consistent with measurements of micromirror roughness components, by white-light interferometry. They reveal relative scatter as low as 10 −4 , which corresponds to contrast ratios up to 10,000. The potential of the technique to resolve phase changes in the subnanometer range is experimentally demonstrated.

: http://publica.fraunhofer.de/dokumente/N-393957.html