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Spatially resolved scatter measurement of diffractive micromirror arrays

: Sicker, Cornelius; Heber, Jörg; Berndt, Dirk

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Erstellt am: 17.6.2016

Applied optics 55 (2016), Nr.16, S.4467-4477
ISSN: 0003-6935
ISSN: 1539-4522
ISSN: 1559-128X
Zeitschriftenaufsatz, Elektronische Publikation
Fraunhofer IPMS ()

Spatial light modulators (SLMs) support flexible system concepts in modern optics and especially phase-only SLMs such as micromirror arrays (MMAs) appear attractive for many applications. In order to achieve a precise phase modulation, which is crucial for optical performance, careful characterization and calibration of SLM devices is required. We examine an intensity-based measurement concept, which promises distinct advantages by means of a spatially resolved scatter measurement that is combined with the MMA’s diffractive principle. Measurements yield quantitative results, which are consistent with measurements of micromirror roughness components, by white-light interferometry. They reveal relative scatter as low as 10 −4 , which corresponds to contrast ratios up to 10,000. The potential of the technique to resolve phase changes in the subnanometer range is experimentally demonstrated.