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Advanced Processing of ITO and IZO Thin Films on Flexible Glass

: Junghähnel, Manuela; Weller, Stephanie; Gebel, Thoralf


Society for Information Display. SID Symposium Digest of Technical Papers 46 (2015), Nr.1, S.1378-1381
ISSN: 2168-0159
ISSN: 0082-0830
Display Week <2015, San Jose/Calif.>
Zeitschriftenaufsatz, Konferenzbeitrag
Fraunhofer FEP ()
Ultra-thin flexible glass; TCOs; ITO; Sputtering; IZO

Ultra-thin 100µm thick flexible glasses with a maximum dimension of 250×300 mm2 were deposited with transparent conductive ITO and IZO using in-line magnetron sputtering under pilot scale conditions. The flexible glass was coated at room temperature with ITO and IZO and further refined by dynamic flash lamp annealing (FLA) in the millisecond range. After flashing the films, we achieved an improved transmittance and a reduced sheet resistance of the films