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Deposition and treatment of titanium based barrier layers by MOCVD
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2003
Conference Paper
Titel
Deposition and treatment of titanium based barrier layers by MOCVD
Author(s)
Ecke, R.
Schulz, S.E.
Gessner, T.
Riedel, S.
Lipp, E.
Eizenberg, M.
Hauptwerk
Chemical vapor deposition XVI and EUROCVD 14. Vol.2
Konferenz
International Conference on Chemical Vapor Deposition 2003
EUROCVD 2003
Electrochemical Society (Meeting) 2003
Language
English
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Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM