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Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Development and characterization of a high aspect ratio vertical FET sensor for motion detection

 
: Buschnakowski, S.; Bertz, A.; Bräuer, W.; Heinz, S.; Schuberth, R.; Ebest, G.; Gessner, T.

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IEEE Electron Devices Society:
Transducers '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Vol.2 : Boston, June 8 - 12, 2003. Digest of technical papers
Piscataway: IEEE Operations Center, 2003
ISBN: 0-7803-7731-1
S.1391-1394
International Conference on Solid State Sensors, Actuators and Microsystems <12, 2003, Boston/Mass.>
Englisch
Konferenzbeitrag
Fraunhofer IZM ()

: http://publica.fraunhofer.de/dokumente/N-39378.html