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CVD TiN layers as diffusion barrier films on porous SiO2 aerogel
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2003
Conference Paper
Titel
CVD TiN layers as diffusion barrier films on porous SiO2 aerogel
Author(s)
Bonitz, J.
Schulz, S.E.
Gessner, T.
Hauptwerk
Materials for advanced metallization
Konferenz
European Workshop on Materials for Advanced Metallization (MAM) LaLondeLesMaures
Language
English
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Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM