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Modeling and model-based control of temperature in an SThM probe

 
: Lenczner, M.; Yang, Bin; Abaidi, M.; Bontempi, A.; Teyssieux, D.; Koehler, B.; Janus, P.

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Institute of Electrical and Electronics Engineers -IEEE-; IEEE Components, Packaging, and Manufacturing Technology Society:
16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2015 : 19-22 April 2015, Budapest, Hungary
Piscataway, NJ: IEEE, 2015
ISBN: 978-1-4799-9949-1 (Print)
ISBN: 978-1-4799-9950-7
ISBN: 978-1-4799-9951-4
S.260-266
International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) <16, 2015, Budapest>
Englisch
Konferenzbeitrag
Fraunhofer IZFP ()

Abstract
We present a multi-scale model of a probe for scanning thermal microscopy. The probe is built by microfabrication techniques. In active mode, it is supplied by a source of harmonic and/or continuous current and the tip temperature is measured after a lock-in amplifier. The model distinguishes two time scales and two space scales. Simulation results show the potential of the model in terms of accuracy and computation speed and they are compared to experimental results. Finally, a temperature control law constructed from this model is stated.

: http://publica.fraunhofer.de/dokumente/N-383284.html