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Advanced x-ray imaging techniques for semiconductor wafer characterisation

 
: Baumbach, T.; Mikulik, P.; Korytar, D.; Pernot, P.; Lubbert, D.; Helfen, L.; Herms, M.; Landesberger, C.

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Breza, J. ; Slovak Academy of Sciences, Institute of Electrical Engineering, Bratislava:
12th International Conference on Semiconducting & Insulating Materials, SIMC-XII-2002 : June 30 - July 5, 2002, Smolenice Castle, Slovakia. Proceedings
Piscataway: IEEE Operations Center, 2002
ISBN: 0-7803-7418-5
S.153-158
International Conference on Semiconducting and Insulating Materials (SIMC) <12, 2002, Smolenice>
Englisch
Konferenzbeitrag
Fraunhofer IZFP, Institutsteil Dresden ( IKTS-MD) ()

: http://publica.fraunhofer.de/dokumente/N-38167.html