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Manufacturing of precise SiC components by Nd:YAG laser radiation

: Kreutz, E.W.; Weichenhain, R.; Horn, A.; Poprawe, R.

Bonnaud, O.:
Polycrystalline semiconductors VI. Materials, technologies, and large area electronics : Proceedings of the sixth international conference, Saint Malo, September 3 - 7, 2000
Uetikon-Zürich: Scitec Publications, 2001 (Diffusion and defect data. B, Solid state phenomena 80/81)
ISBN: 3-908450-63-2
International Conference Polycrystalline Semiconductors - Materials, Technologies, and Large Area Electronics (POLYSE) <6, 2000, Saint Malo>
Konferenzbeitrag, Zeitschriftenaufsatz
Fraunhofer ILT ()

Micromachining of SiC with Nd:YAG laser radiation was performed in various processing gas atmospheres as a function of processing variables showing the influence of the heat and pressure load onto the precise geometric structures. Among effective material removal and reducing of debris in the surrounding of the generated structures the achievable surface roughness of microstructured ceramics are investigated, determining not only the dependence on overlap and fluence but also the influence of the properties of the processing gas atmosphere. 3d microstructures are produced by scanning and turning the focused laser beam onto the material surface. Structures < 100 mum and surface roughness < 1 mum require an overlap < 0.8 independent of the type of processing gas.