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Towards alpha radiation detection in aqueous solution: VLSI technology development for diamond-silicon hybrid sensors

: Giese, C.; Lewes-Malandrakis, G.; Sanoit, J. de; Pomorski, M.; Nebel, C.


MRS online proceedings library. Online resource 1788 (2015)
ISSN: 1946-4274
Materials Research Society (Spring Meeting) <2015, San Francisco/Calif.>
Zeitschriftenaufsatz, Konferenzbeitrag
Fraunhofer IAF ()
diamond; electrodeposition; actinide

In the presented work, we have developed VLSI technology processes for new prototype sensors based on the synthesis of boron doped nanocrystalline diamond (B-NCD) and silicon based commercial detectors. The process is based on commercial passivated implanted planar silicon (PIPS) devices of PD450 and CAM450 types (CANBERRA). A layer of B-NCD of several hundred nanometers thickness and boron concentration up to 1021 atoms/cm3 is grown on the SiOx passivation layer in an ellipsoidal plasma enhanced chemical vapor deposition (PECVD) reactor at temperatures from 520-750°C, in hydrogen atmosphere. . The diamond electrode is dry chemically structured and aluminum electrodes are realized before mounting in a three-fold housing for measurements in aqueous solution. The prototype sensors show an alpha spectroscopy resolution of 100 keV for 241Am electroprecipitated from liquid solution.