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The stability of C60 and its derivatives upon handling in microsystems technologies

: Klocek, Jolanta; Friedrich, Daniel; Schmeißer, Dieter; Hecker, Michael; Zschech, Ehrenfried


Domaradzki, J. ; Hochschule Harz, Wernigerode; Institute of Electrical and Electronics Engineers -IEEE-:
International Students and Young Scientists Workshop "Photonics and Microsystems" 2009 : Wernigerode, Germany, 25 - 27 June 2009; International Optoelectronics Workshop
Piscataway, NJ: IEEE, 2009
ISBN: 978-1-4244-4304-8 (Print)
ISBN: 978-1-4244-4303-1
International Students and Young Scientists Workshop "Photonics and Microsystems" <2009, Wernigerode>
International Optoelectronics Workshop <2009, Wernigerode>
Fraunhofer IKTS ()
spin coating; thermal spray coatings; thin films; vacuum deposition

We investigate C60, C60(OH)24, C60(F3)12, C60Cl2 and analyse the stability of these derivatives upon processing in sol-gel, spin-coating, spraying, dropping and evaporating procedures to obtain thin films for possible microsystems application. We use X-ray photoelectron spectroscopy (XPS), Fourier transform infrared spectroscopy (FTIR), Raman spectroscopy, Near Edge X-ray Absorption Fine Structure Spectroscopy (NEXAFS) to analyse the fullerene species within the films. We find fullerene molecules stable in evaporation procedure but not stable in films obtained by using fullerenes dissolved in toluene, chlorobenzene and cyclohexane. Most stable are the evaporated films of pure C60, while the soluble derivatives are less stable. The fluorine derivatives are most stable when processed by spray coating with ethanol as a solvent. Fullerol was dissolved in H2O and films are obtained by spray coating.