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Wake up MEMS for inertial sensors

: Stoeckel, C.; Billep, D.; Konietzka, S.; Zimmermann, S.; Otto, T.


Institute of Electrical and Electronics Engineers -IEEE-:
2nd IEEE International Symposium on Inertial Sensors and Systems, ISISS 2015. Proceedings : March 23-26, 2015, Hapuna Beach Prince Hotel, Hawaii, USA
Piscataway, NJ: IEEE, 2015
ISBN: 978-1-4799-5914-3
ISBN: 978-1-4799-5915-0
International Symposium on Inertial Sensors and Systems (ISISS) <2, 2015, Hapuna Beach/Hawaii>
Fraunhofer ENAS ()

A piezoelectric MEMS with wake up function, Power down interrupt generator (PDIG), for inertial sensor systems is reported. The aluminum nitride based MEMS generates electric signals intrinsically in result of an inertial accelerations. The PDIG is optimized for maximum charge and voltage sensitivity. The charge sensitivity for a single electrode designed PDIG is measured with 40.1 pC/g and the maximum voltage sensitivity with 1.273 V/g. The device shows a high linearity and reproducibility. The PDIG is merged with a CMOS electronic, designed for low current consumption in sleeping mode. The minimum acceleration to wake up the system is adjustable and measured with 0.08 g.