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Upscaling of the inkjet printing process for the manufacturing of passive electronic devices

: Sternkiker, C.; Sowade, E.; Mitra, K.Y.; Zichner, R.; Baumann, R.R.


IEEE transactions on electron devices 63 (2016), Nr.1, S.426-431
ISSN: 0018-9383
Fraunhofer ENAS ()

This paper demonstrates the manufacturing of inductor coils, capacitors, and rectifying diodes solely using the inkjet printing technology. Industrially relevant printheads from Fujifilm Dimatix were employed to prove the process scalability of the inkjet printing technology by manufacturing hundreds of devices. Organic and inorganic conductors and different organic dielectrics were applied for the manufacturing of electrical devices as well as a p-type organic semiconductor. The manufacturing yield effects of varying printing parameters, such as print resolution (drop spacing) and the size of the printed area on the layer morphology and electrical characteristics, were investigated.