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Magnetic-abrasive machining of silicon wafers - a novel approach
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2004
Journal Article
Titel
Magnetic-abrasive machining of silicon wafers - a novel approach
Author(s)
Khomich, Mikalai
Alexeev, Y.
Demmer, Axel
Pähler, Dietmar
Dambon, Olaf
Schneider, U.
Zeitschrift
Industrial diamond review : IDR
Language
English
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Fraunhofer-Institut fĂĽr Produktionstechnologie IPT