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Integrative quality assurance of micro-parts using microfeatures

: Fleischer, J.; Spath, D.; Elsner, J.


Microsystem Technologies 10 (2004), Nr.3, S.162-166
ISSN: 0946-7076
Fraunhofer IAO ()

The article introduces the "Microfeature Catalogue" as an information database that is structured by Microfeatures and can be used for preventive and non-preventive quality assurance. The Microfeature conception is adapted and evaluated in the specific fabrication environment of micro mechanical components. The production of micro parts demands a further development of the new fabrication technologies on the one hand and an appropriate development of the concomitant processes such as the quality assurance process on the other hand. A coherent information cycle between design, fabrication and quality assurance is put into practice.