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Mu-m-resolved high resolution x-ray diffraction imaging for semiconductor quality control
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2000
Journal Article
Titel
Mu-m-resolved high resolution x-ray diffraction imaging for semiconductor quality control
Author(s)
Lübbert, D.
Baumbach, T.
Härtwig, J.
Boller, E.
Pernot, E.
Zeitschrift
Nuclear instruments and methods in physics research, Section B. Beam interactions with materials and atoms
DOI
10.1016/S0168-583X(99)00619-9
Language
English
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