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Measuring acid generation efficiency in chemically amplified resists with all 3 beams
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1999
Journal Article
Titel
Measuring acid generation efficiency in chemically amplified resists with all 3 beams
Author(s)
Szmanda, C.R.
Brainard, R.L.
Mackevich, J.F.
Awaji, A.
Tanaka, T.
Yamada, Y.
Bohland, J.
Tedesco, S.
Dalzotto, B.
Bruenger, W.
Torkler, M.
Fallmann, W.
Loeschner, H.
Kaesmaier, R.
Nealey, P.M.
Pawloski, A.R.
Zeitschrift
Journal of vacuum science and technology B. Microelectronics and nanometer structures
DOI
10.1116/1.591011
Language
English
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Fraunhofer-Institut für Siliziumtechnologie ISIT