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A new generation of filtered arc sources for ultrathin top coats on magnetic hard disks
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2004
Conference Paper
Titel
A new generation of filtered arc sources for ultrathin top coats on magnetic hard disks
Author(s)
Siemroth, P.
Berthold, J.
Petereit, B.
Schneider, H.H.
Hilgers, H.
Hauptwerk
31th International Conference on Metallurgical Coatings and Thin Films 2004. Proceedings
Konferenz
International Conference on Metallurgical Coatings and Thin Films (ICMCTF) 2004
DOI
10.1016/j.surfcoat.2004.07.004
Language
English
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Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS