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Coherent Diffractive Imaging with a Laboratory-Scale, Gas-Discharge Plasma Extreme Ultraviolet Light Source

: Bußmann, J.; Odstrcil, M.; Bresenitz, R.; Rudolf, D.; Miao, J.; Brocklesby, W.S.; Juschkin, L.


Rocca, J.; Menoni, C.; Marconi, M.:
X-Ray Lasers 2014 : Proceedings of the 14th International Conference on X-Ray Lasers, 26-30 May 2014, Fort Collins, Colo.
Cham: Springer International Publishing, 2016 (Springer Proceedings in Physics 169)
ISBN: 978-3-319-19520-9 (print)
ISBN: 978-3-319-19521-6 (online)
International Conference on X-Ray Lasers <14, 2014, Fort Collins/Colo.>
Fraunhofer ILT ()

Coherent diffractive imaging (CDI) and related techniques enable a new type of diffraction-limited high resolution microscopy and have been widely used in the extreme ultraviolet (EUV) and X-ray communities. In this experiment, we demonstrate CDI using a compact gas-discharge EUV light source with a wavelength of 17.3 nm (oxygen VI emission). Our image reconstruction method accounts for the partial spatial coherence of the radiation using a deconvolution technique. Our results are promising for future laboratory-scale CDI applications, including mask inspection for EUV lithography and EUV metrology