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Special issue containing selected papers from the E-MRS proceedings of symposium-j - materials in microtechnologies and microsystems - Strasbourg, France - june 5-8, 2001. Preface
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2002
Journal Article
Titel
Special issue containing selected papers from the E-MRS proceedings of symposium-j - materials in microtechnologies and microsystems - Strasbourg, France - june 5-8, 2001. Preface
Author(s)
Morante, J.R.
Barbier, D.
Michel, B.
Zeitschrift
Sensors and Actuators. A
DOI
10.1016/S0924-4247(01)00875-5
Language
English
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Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM