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Mechanical reliability of MEMS-structures under shock load
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2001
Journal Article
Titel
Mechanical reliability of MEMS-structures under shock load
Author(s)
Wagner, U.
Franz, J.
Schweiker, M.
Bernhard, W.
Müller-Fiedler, R.
Michel, B.
Paul, O.
Zeitschrift
Microelectronics reliability
DOI
10.1016/S0026-2714(01)00173-1
Language
English
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Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM