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Innovative design and modeling of a micromechanical relay with electrostatic actuation
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2001
Journal Article
Titel
Innovative design and modeling of a micromechanical relay with electrostatic actuation
Author(s)
Sattler, R.
Voigt, P.
Pradel, H.
Wachutka, G.
Zeitschrift
Journal of micromechanics and microengineering
DOI
10.1088/0960-1317/11/4/325
Language
English
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Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS