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In-situ measurement of the crystallization of amorphous- silicon in a vertical furnace using spectroscopic ellipsometry
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2001
Journal Article
Titel
In-situ measurement of the crystallization of amorphous- silicon in a vertical furnace using spectroscopic ellipsometry
Author(s)
Petrik, P.
Lehnert, W.
Schneider, C.
Lohner, T.
Fried, M.
Gyulai, J.
Ryssel, H.
Zeitschrift
Thin solid films
DOI
10.1016/S0040-6090(00)01792-2
Language
English
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Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB