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Optical in-situ measurement of the dissolution rate of a Silica-Czochralski-crucible with silicon melt and comparison to ex-situ measurements
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2001
Journal Article
Titel
Optical in-situ measurement of the dissolution rate of a Silica-Czochralski-crucible with silicon melt and comparison to ex-situ measurements
Author(s)
Mühe, A.
Müller, G.
Zeitschrift
Microelectronic engineering
DOI
10.1016/S0167-9317(00)00518-9
Language
English
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Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB