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Electrothermal piezoresistive cantilever resonators for personal measurements of nanoparticles in workplace exposure

: Wasisto, H.S.; Wu, W.; Uhde, E.; Waag, A.; Peiner, E.


Sánchez-Rojas, José Luis (Hrsg.) ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems : Barcelona, Spain, 4 - 6 May 2015
Bellingham, WA: SPIE, 2015 (Proceedings of SPIE 9517)
ISBN: 978-1-62841-639-8
Paper 95170B, 8 S.
Conference "Smart Sensors, Actuators, and MEMS" <7, 2015, Barcelona>
Conference "Cyber Physical Systems" <2015, Barcelona>
Fraunhofer WKI ()

Low-cost and low-power piezoresistive cantilever resonators with integrated electrothermal heaters are developed to support the sensing module enhancement of the second generation of handheld cantilever-based airborne nanoparticle (NP) detector (CANTOR-2). These sensors are used for direct-reading of exposure to carbon engineered nanoparticles (ENPs) at indoor workplaces. The cantilever structures having various shapes of free ends are created using silicon bulk micromachining technologies (i.e, rectangular, hammer-head, triangular, and U-shaped cantilevers). For a complete wearable CANTOR-2, all components of the proposed detector can be grouped into two main units depending on their packaging placements (i.e., the NP sampler head and the electronics mounted in a handy-format housing). In the NP sampler head, a miniaturized electrophoretic aerosol sampler and a resonant silicon cantilever mass sensor are employed to collect the ENPs from the air stream to the cantilever surfaces and measuring their mass concentration, respectively. After calibration, the detected ENP mass concentrations of CANTOR-2 show a standard deviation from fast mobility particle sizer (FMPS, TSI 3091) of 8-14%.