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Materials for Advanced Metallization 2014 (MAM 2014). Preface

A Microelectronic Engineering open special focused issue including selected papers from the 23rd European Workshop on Materials for Advanced Metallization 2014, Chemnitz, Germany, March 2-5, 2014

: Schulz, S.E.; Hecker, M.; Korner, H.; Wolf, H.

DOI: 10.1016/S0167-9317(15)00179-3

	Microelectronic engineering 137 (2015), S.VII ISSN: 0167-9317
	Workshop on "Materials for Advanced Metallization" (MAM) <23, 2014, Chemnitz>

	Englisch
	Konferenzbeitrag, Zeitschriftenaufsatz
	Fraunhofer ENAS ()

: http://publica.fraunhofer.de/dokumente/N-369704.html