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Innovative and established strategies for the surface analysis of nitrogen and oxygen-rich plasma polymer films by XPS: An introductory guide

: Girard-Lauriault, P.L.; Unger, W.E.S.; Dietrich, P.M.; Holländer, A.


Plasma Processes and Polymers 12 (2015), Nr.9, S.953-967
ISSN: 1612-8850
ISSN: 1612-8869
Fraunhofer IAP ()

Nitrogen- and oxygen-based plasma polymer films are materials with a complex and partially elusive surface chemistry. We present an overview of innovative and established X-ray photoelectron spectroscopy (XPS)-based analysis strategies developed to elucidate the surface chemistry of such films. We focus on both experimental methods and data analysis strategies and include the following topics: high-resolution spectra curve fitting, aging, chemical derivatization, and depth profiling by angle- and energy-resolved XPS.