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SIMS profiling and TEM of CVD films on multi-filament samples
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2000
Journal Article
Titel
SIMS profiling and TEM of CVD films on multi-filament samples
Author(s)
Dietrich, D.
Willich, P.
Stöckel, S.
Weise, K.
Marx, G.
Zeitschrift
Mikrochimica Acta
DOI
10.1007/s006040070090
Language
English
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Fraunhofer-Institut für Schicht- und Oberflächentechnik IST