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Irradiation of low energy ions damage analysis on multilayers

: Sertsu, M.G.; Giglia, A.; Juschkin, L.; Nicolosi, P.

Volltext urn:nbn:de:0011-n-3673326 (553 KByte PDF)
MD5 Fingerprint: b52c0519fc4b85cbf6aac8eba7c6d8c8
Erstellt am: 13.1.2016

Juha, Libor ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Damage to VUV, EUV, and X-ray Optics V : 15-16 April 2015, Prague, Czech Republic
Bellingham, WA: SPIE, 2015 (Proceedings of SPIE 9511)
ISBN: 978-1-62841-632-9
Paper 95110P, 8 S.
Conference "Damage to VUV, EUV, and X-Ray Optics" <5, 2015, Prague>
Konferenzbeitrag, Elektronische Publikation
Fraunhofer ILT ()

Impacts of low energy He+ ions on reflectivity and stability of EUV multilayers is investigated in this work. Combination of X-ray reflectivity, grazing incidence EUV reflectivity near Silicon edge, and theoretical ion irradiation damage analysis can explain the degradation of ML performances. It is found that MLs irradiation of 4 keV helium ions degrades reflectivity performances with much more impact on grazing incidence mirrors. The proposed method can also regain changes in optical properties due to the irradiations of low energy ions.