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Employing partially coherent, compact gas-discharge sources for coherent diffractive imaging with extreme ultraviolet light

 
: Bußmann, J.; Odstrčil, M.; Bresenitz, R.; Rudolf, D.; Miao, J.; Brocklesby, W.S.; Grützmacher, D.; Juschkin, L.

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Postprint urn:nbn:de:0011-n-3673310 (547 KByte PDF)
MD5 Fingerprint: 6352face7e8dbfa4aba8f4c8d64fc6e5
Copyright Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
Erstellt am: 13.1.2016


Klisnick, A. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
X-ray lasers and coherent x-ray sources: Development and applications XI : 12 - 13 August 2015, San Diego, California, USA
Bellingham, WA: SPIE, 2015 (Proceedings of SPIE 9589)
ISBN: 978-1-62841-755-5
Paper 95890L, 8 S.
X-Ray Lasers and Coherent X-Ray Sources - Development and Applications Conference <11, 2015, San Diego/Calif.>
Englisch
Konferenzbeitrag, Elektronische Publikation
Fraunhofer ILT ()

Abstract
Coherent diffractive imaging (CDI) and related techniques enable a new type of diffraction-limited high-resolution extreme ultraviolet (EUV) microscopy. Here, we demonstrate CDI reconstruction of a complex valued object under illumination by a compact gas-discharge EUV light source emitting at 17.3 nm (O VI spectral line). The image reconstruction method accounts for the partial spatial coherence of the radiation and allows imaging even with residual background light. These results are a first step towards laboratory-scale CDI with a gas-discharge light source for applications including mask inspection for EUV lithography, metrology and astronomy.

: http://publica.fraunhofer.de/dokumente/N-367331.html