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High-performnace Cr/Sc multilayers for the soft X-ray range

: Yulin, S.; Feigl, T.; Kaiser, N.


Amra,C.; Kaiser, N.; Macleod, H.A. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Advances in Optical Thin Films II : SPIE Conference on Optical Systems Design, 12-16 September 2005, Jena, Germany
Bellingham/Wash.: SPIE, 2005 (SPIE Proceedings Series 5963)
ISBN: 0-8194-5981-X
Conference on Optical Systems Design <2005, Jena, Germany>
Fraunhofer IOF ()
Cr/Sc multilayer; crystalline structure; interface roughness; reflectivity

Results of soft x-ray reflection measurements of Cr/Sc multilayer mirrors dose to the Sc-L (? = 3.11 nm) and C-K (?=4.44 nm) absorption edges are presented. In particular, normal - incidence reflectivity measurements performed at BESSY II facility revealed a reflectivity of R = 17.3% @ 3.11 nm and 7.0 % @ 4.44 nm. Simulation results show that the interface roughness in the best Cr/Sc structures are less than 0.4 nm and strongly depend on the crystalline structure of the layers.