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Research and development of VUV optical coatings for micro mirrors applications

: Yang, M.; Gatto, A.; Kaiser, N.

Guangxue-jingmi-gongcheng = Optics and precision engineering 13 (2005), Nr.4, S.465-470
ISSN: 1004-924X
Fraunhofer IOF ()
vacuum UV; thin film; micro mirror; spatial light modulator

This paper deals with vacuum UV optical coatings for micro mirror applications. High reflecting low-stress optical coatings have been developed for the next-generation of micro mechanical mirrors. The optimized metal systems are applicable in the VUV spectral region and can be integrated in the technology of MOEMS, such as spatial light modulators (SLM) and micro scanning mirrors.