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Thin film metallization of PDMS with improved adhesion properties for micro electrode arrays

Presented at the 14th International Conference on Nanoimprint and Nanoprint Technology, NNT 2015. 22-24 October 2015, Napa, California

Poster urn:nbn:de:0011-n-3642830 (3.0 MByte PDF)

MD5 Fingerprint: 59f303cc531e7ba0ab4c73dd6f4b52a5

Erstellt am: 4.11.2015

	2015, 1 S. International Conference on Nanoimprint and Nanoprint Technology (NNT) <14, 2015, Napa/Calif.>

	Englisch
	Poster, Elektronische Publikation
	Fraunhofer IISB ()
	PDMS; metal electrode; sputtering; patterning