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Large area atmospheric pressure plasma processes

Applications of the LARGE plasma source
 
: Kotte, Liliana; Roch, Julius; Mäder, Gerrit; Haag, Jana; Mertens, Tobias

Bogaerts, Annemie (Chairman); Sanden, Richard van de (Chairman) ; University of Antwerp:
ISPC 22, 22nd International Symposium on Plasma Chemistry. Proceedings : Sunday 5 to Friday 10 July 2015, University of Antwerp, Stadscampus, Antwerp, Belgium
Antwerpen, 2015
Paper P-III-6-26, 3 S.
International Symposium on Plasma Chemistry (ISPC) <22, 2015, Antwerpen>
European Commission EC
FP7-NMP; 309530; PLIANT
Process Line Implementation for Applied Surface Nanotechnologies
Englisch
Konferenzbeitrag
Fraunhofer IWS ()
atmospheric plasma source; siliciumdioxid; CFK; CFRP

Abstract
The LARGE plasma source based on an extended DC arc offers a scalable working width up to 350 mm and operates with a range of plasma gases like argon, plus molecular gases like H2, O2, CO2, N2 or pure nitrogen and compressed air. Selected plasma gas mixtures were characterized (temperature and OES). Application such as SiO2 adhesion layers on titan or plasma pre-treatment of CFRP will be presented.

: http://publica.fraunhofer.de/dokumente/N-364150.html