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2015
Presentation
Titel
Quality control of SiC materials by optical detection of defects
Titel Supplements
Presentation held at Aixtron user meeting at ICSCRM 2015, Giardini Naxos, Italy, October, 4th - 9th, 2015
Alternative
Qualitätskontrollmessungen an SiC-Material durch optische Detektion der Defekte
Author(s)