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2005
Conference Paper
Titel
Wafer scale characterization of interface state densities without test structures by photocurrent analysis
Abstract
In this work, a new method is presented for a direct and fast extraction of effective interface state densities Dit,eff at semiconductor insulator interfaces from photocurrent measurements. A theoretical model will be introduced which describes the experimental data with excellent agreement. The straightforward approach is also capable to reproduce the correlation factor between results from the photocurrent method and conventional Dit measurement methods.