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Requirements on glasses for femtosecond-laser bases micro-structuring

: Seuthe, Thomas; Grehn, Moritz; Mermillod-Blondin, Alexandre; Bonse, Jörn; Eberstein, Markus

International Microelectronics and Packaging Society -IMAPS-; American Ceramic Society -ACerS-, Westerville/Ohio:
11th IMAPS/ACerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2015 : Held 20 - 23 April 2015, Dresden, Germany
Red Hook, NY: Curran, 2015
ISBN: 978-1-5108-0456-2
International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT) <11, 2015, Dresden>
Deutsche Forschungsgemeinschaft DFG
EB 248/4 2; Laser-Glas Strukturierung
Fraunhofer IKTS ()
femtosecond-laser; Glass; micro-Raman spectroscopy

In this work, glasses with systematically varied compositions were manufactured and irradiated by single Ti: sapphire fs-laserpulses (800 nm, 120 fs), focused at the surface and into the bulk of the glass materials. The samples were tested for their ablation threshold fluence as well as for structural changes using ?-Raman-spectroscopy. Correlations between the glass composition, the material-ablation on the glass surface and the permanent changes of the refractive index inside the glass volume after the irradiation by fs-laser pulses were obtained. The results show, that the structural modifications found at the surface of the glasses and inside its volume are closely related. However, while the ablation threshold fluence of the glass surface primarily depends on the glass dissociation energy, the permanent refractive index change inside the volume is rather determined by its ability for absorbing the fs-laser pulses and the subsequent relaxation processes. The results of this work provide some guidance on how the glass composition can be varied in order to optimize the fs-laser induced modification of dielectrics.