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Micro-positioning stages for adaptive optics based on piezoelectric thick film actuators

: Gebhardt, Sylvia; Ernst, Dörthe; Bramlage, Bernhardt

International Microelectronics and Packaging Society -IMAPS-; American Ceramic Society -ACerS-, Westerville/Ohio:
11th IMAPS/ACerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2015 : Held 20 - 23 April 2015, Dresden, Germany
Red Hook, NY: Curran, 2015
ISBN: 978-1-5108-0456-2
International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT) <11, 2015, Dresden>
Deutsche Forschungsgemeinschaft DFG
SPP 1337; GE 2078/2-1
Adaptierbare plenoptische Kameras: Design, Herstellung, Integration
Fraunhofer IKTS ()
PZT; thick film; screen printing; actuator; adaptive optics; micro-positioning

Piezoceramic actuators based on thick film technology offer the opportunity of integrated solutions for smart microsystems. Especially in adaptive micro-optics, where the height of devices is limited, outgassing has to be inhibited and complex actuator structures are required, screen printed actuators are of great interest. The paper highlights our recent research on micro-positioning stages for integration into a plenoptic camera. The first concept is based on through-thickness polarized lead zirconate titanate (PZT) thick films printed on a 45 mm x 44 mm x 0.17 mm LTCC (Low Temperature Cofired Ceramics) frame with 4 mm wide legs. Driving with an electrical field of 2 kV/mm resulted in an upright stroke of 115 µm. The second concept combines through-thickness and in-plane polarized thick films on four cantilever beams of an Al2O3 based micro-positioning stage. Because of the combination of d31- and d33-mode of excitation, each cantilever beam will provide an s-shaped bending profile allowing for a planar and tilt free lift of 130 µm at 1.66 kV/mm. Both actuator concepts were exploited to adjust position of a micro-lens array between main lens and image sensor in a plenoptic camera setup. With that, working range of the plenoptic camera could be extended.