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Metastable defects in proton implanted and annealed silicon

Poster presented at GADEST 2015, 16th Conference on Gettering and Defect Engineering in Semiconductor Technology, September 20th to 25th, 2015, Bad Staffelstein, Germany
 
: Jelinek, Moriz

:
Poster urn:nbn:de:0011-n-3605718 (944 KByte PDF)
MD5 Fingerprint: 4935ba6aea99ec9d1d0f71464cc8fbfb
Erstellt am: 6.10.2015


2015, 1 Folie
Conference on Gettering and Defect Engineering in Semiconductor Technology (GADEST) <16, 2015, Bad Staffelstein>
Englisch
Poster, Elektronische Publikation
Fraunhofer IISB ()
DLTS; proton implantation; metastable defect

: http://publica.fraunhofer.de/dokumente/N-360571.html