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Fabrication of periodic submicrometer and micrometer arrays using laser interference-based methods

: Lasagni, Andrés-Fabián; Beyer, Eckhard


Lawrence, J. (ed.):
Laser surface engineering. Processes and applications
Cambridge: Woodhead Publishing, 2015 (Woodhead publishing series in eletronic and optical materials 65)
ISBN: 978-1-78242-074-3
ISBN: 978-1-78242-079-8
Aufsatz in Buch
Fraunhofer IWS ()
surface functionalization; interference patterning; laser structuring; microstructuring

Recent advancements in patterning technologies have considerably enhanced the ability to control both surface chemistry and topography of various materials at the microscale, thus allowing material properties to be tailored. Although several methods have been developed to fabricate complex 2-D and 3-D structures, many of them show significant limitations, such as low fabrication speed and flexibility. Laser interferometric techniques permit us to overcome these limitations by producing periodic surface patterns even in the submicrometer scales in a one-step process. Therefore, this chapter will focus on technological aspects of the methods showing the possibility for the surface structuring of metals, polymer films, and conducting polymers.


1. Introduction / 2. Multibeam interference patterns / 3. Laser interference lithography / 4. Direct laser interference pattering / 5. Laser interference pattering systems / References