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An approach to the development of tolerance systems for micro- and nanotechnology

: Schöbel, J.; Westkämper, E.


Wilkening, G.:
Nanoscale calibration - standards and methods : Dimensional and related measurements in the micro- and nanometer range. Proceedings, NanoScale 2004, March 25th and 26th, 2004, Braunschweig
Weinheim: Wiley-VCH, 2005
ISBN: 3-527-40502-X
ISBN: 978-3-527-40502-2
Seminar on Quantitative Microscopy <6, 2004, Braunschweig>
Seminar on Nanoscale Calibration Standards and Methods (NanoScale) <2, 2004, Braunschweig>
Fraunhofer IPA ()
microtechnology; nanotechnology; Toleranzsystem; measurement; tolerance; microscopy; sputtering; Fertigungsprozeß

Production processes with an accuracy in the range down to the nanometer scale gain growing importance in industry. A crucial requirement for their economical application are capable and controlled processes. These in turn are dependent on suitable measurement devices and strategies. Though measurement devices with the required precision are available, strategies and tolerance systems in the considered dimension do not exist. In this chapter an approach to the development of tolerance systems for features in micro- and nanotechnology is presented as the examples micromilling and sputtering as production processes as well as atomic force microscopy as a measurement process.