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LTCC-based three dimensional inductors with nano-ferrite embedded core for one-chip tunable RF system

 
: Lin, Y.-C.; Gabler, F.; Tsai, Y.-C.; Tanaka, S.; Gessner, T.; Esashi, M.

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Institute of Electrical and Electronics Engineers -IEEE-:
Transducers 2013, 17th International Conference on Solid-State Sensors, Actuators and Microsystems : Eurosensors XXVII; Barcelona, Catalonia (Spain); 16 - 20 June 2013
Piscataway, NJ: IEEE, 2013
ISBN: 978-1-4673-5981-8
ISBN: 978-1-4673-5983-2
S.1404-1407
International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) <17, 2013, Barcelona>
European Conference on Solid-State Transducers (Eurosensors) <27, 2013, Barcelona>
Englisch
Konferenzbeitrag
Fraunhofer ENAS ()

Abstract
In this study, anodically-bondable LTCC (low temperature cofired ceramic) technology is applied for forming inductors to realizes three-dimensional configuration, simplify fabrication process and miniaturize device size. Nano-ferrite is embedded as core material to increase performance of the integrated inductors. Design, simulation, fabrication are described and characterized results indicate the potential of using this approach for future one-chip tunable RF systems.

: http://publica.fraunhofer.de/dokumente/N-356411.html