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Evaluation of sputtered Pd76Cu6Si18 metallic glass for MEMS application
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2015
Conference Paper
Titel
Evaluation of sputtered Pd76Cu6Si18 metallic glass for MEMS application
Author(s)
Vogel, Klaus
Wiemer, Maik
Geßner, Thomas
Vogel, J.
Lin, Y.-C.
Tsai, Y.-C.
Esashi, M.
Tanaka, S.
Hauptwerk
Smart Systems Integration 2015
Konferenz
Smart Systems Integration Conference (SSI) 2015
International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components 2015
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS