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Practice-oriented optical thin film growth simulation via multiple scale approach

 
: Turowski, M.; Jupé, M.; Melzig, T.; Moskovkin, P.; Daniel, A.; Pflug, A.; Lucas, S.; Ristau, D.

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Thin solid films 592 (2015), Pt.B, S.240-247
ISSN: 0040-6090
International Conference on Frontiers of Optical Coatings (FOC) <2014, Shanghai>
Englisch
Zeitschriftenaufsatz, Konferenzbeitrag
Fraunhofer IST ()
multiple scale modeling; direct simulation Monte Carlo; kinetic Monte Carlo; Molecular dynamics; density functional theory; ion beam sputtering; thin films

Abstract
Simulation of the coating process is a very promising approach for the understanding of thin film formation. Nevertheless, this complex matter cannot be covered by a single simulation technique. To consider all mechanisms and processes influencing the optical properties of the growing thin films, various common theoretical methods have been combined to a multi-scale model approach. The simulation techniques have been selected in order to describe all processes in the coating chamber, especially the various mechanisms of thin film growth, and to enable the analysis of the resulting structural as well as optical and electronic layer properties. All methods are merged with adapted communication interfaces to achieve optimum compatibility of the different approaches and to generate physically meaningful results. The present contribution offers an approach for the full simulation of an Ion Beam Sputtering (IBS) coating process combining direct simulation Monte Carlo, classic al molecular dynamics, kinetic Monte Carlo, and density functional theory. The simulation is performed exemplary for an existing IBS-coating plant to achieve a validation of the developed multi-scale approach. Finally, the modeled results are compared to experimental data.

: http://publica.fraunhofer.de/dokumente/N-352393.html