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Mechanical characterization between room temperature and 1000 °C of SiC free-standing thin films by a novel high-temperature micro-tensile setup

: Leisen, D.; Rusanov, R.; Rohlfing, F.; Fuchs, T.; Eberl, C.; Riesch-Oppermann, H.; Kraft, O.


Review of scientific instruments 86 (2015), Nr.5, Art. 055104
ISSN: 0034-6748
ISSN: 1089-7623
Fraunhofer IWM ()

A novel high-temperature micro-tensile setup allows the characterization of the elastic and plastic as well as creep behavior of free-standing thin films at temperatures of up to 1000 °C. Correspondingly, a new layout for free-standing thin film tensile test structures has been developed, enabling accurate self-alignment upon loading. Furthermore, a differential optical strain measurement technique as well as optimizations of the optical path has been implemented, providing a strain resolution of well below 1 × 10-4 at 1000 °C. Two different polycrystalline SiC free-standing thin films have been investigated in tension to acquire stress-strain data and corresponding Young's modulus at up to 1000 °C. The high sensitivity of the strain measurement technique makes it also possible to identify creep strains in the high-temperature regime.