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Porous MgF2 antireflective λ/4 films prepared by sol-gel processing: Comparison of synthesis approaches

: Scheurell, K.; Kemnitz, E.; Garcia-Juan, P.; Eicher, J.; Lintner, B.; Hegmann, J.; Jahn, R.; Hofmann, T.; Löbmann, P.


Journal of Sol-Gel Science and Technology 76 (2015), Nr.1, S.82-89
ISSN: 0928-0707
ISSN: 1573-4846
Fraunhofer ISC ()

Porous MgF2 is a highly promising film material for the preparation of durable antireflective coatings. Synthesis routes based on Mg(OMe)2 and Mg(OAc)2 precursors are described, and the resulting sol–gel films and their thermal consolidation are compared using thermal analysis (TGA/DTA), scanning electron microscopy, ellipsometric porosimetry and X-ray diffraction. Due to their constant viscosity, Mg(OAc)2-based coating solutions are superior from the practical point of view. The porous films are stable against degradation under the steady-state temperature humidity life test (85/85), and they can successfully be integrated into TiO2–MgF2–TiO2 interference filters.