
Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. CMOS-compatible metal-stabilized nanostructured Si as anodes for lithium-ion microbatteries
| Nanoscale research letters : NRL 9 (2014), Art. 613, 8 S. ISSN: 1931-7573 ISSN: 1556-276X |
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| Englisch |
| Zeitschriftenaufsatz, Elektronische Publikation |
| Fraunhofer IWM ( IMWS) () |
Abstract
The properties of fully complementary metal-oxide semiconductor (CMOS)-compatible metal-coated nanostructured silicon anodes for Li-ion microbatteries have been studied. The one-dimensional nanowires on black silicon (nb-Si) were prepared by inductively coupled plasma (ICP) etching and the metal (Au and Cu) coatings by successive magnetron sputtering technique. The Cu-coated nb-Si show the most promising electrochemical performance enhancements for the initial specific capacity as well as their cyclability compared to pristine nb-Si. The electrochemical and microstructural properties before and after cycling of the metal-coated nb-Si compared to their pristine counterparts are discussed in detail.