Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

CMOS-compatible metal-stabilized nanostructured Si as anodes for lithium-ion microbatteries

: Lee, G.; Schweizer, S.L.; Wehrspohn, R.B.

Volltext (PDF; )

Nanoscale research letters : NRL 9 (2014), Art. 613, 8 S.
ISSN: 1931-7573
ISSN: 1556-276X
Zeitschriftenaufsatz, Elektronische Publikation
Fraunhofer IWM ( IMWS) ()

The properties of fully complementary metal-oxide semiconductor (CMOS)-compatible metal-coated nanostructured silicon anodes for Li-ion microbatteries have been studied. The one-dimensional nanowires on black silicon (nb-Si) were prepared by inductively coupled plasma (ICP) etching and the metal (Au and Cu) coatings by successive magnetron sputtering technique. The Cu-coated nb-Si show the most promising electrochemical performance enhancements for the initial specific capacity as well as their cyclability compared to pristine nb-Si. The electrochemical and microstructural properties before and after cycling of the metal-coated nb-Si compared to their pristine counterparts are discussed in detail.