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Smart monitoring systems for a green future

: Saupe, R.; Stock, V.; Otto, T.; Kurth, S.; Hiller, K.; Meinig, M.; Neumann, N.; Gessner, T.


Claeys, C. ; Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.:
China Semiconductor Technology International Conference, CSTIC 2014 : Held March 16 - 17, 2014 in Shanghai, China
Pennington, NJ: ECS, 2014 (ECS transactions 60.2014, Nr.1)
ISBN: 978-1-62332-149-9
ISBN: 978-1-60768-504-3
ISBN: 978-1-60768-505-0
China Semiconductor Technology International Conference (CSTIC) <2014, Shanghai>
Fraunhofer ENAS ()

MEMS based devices have a huge potential in different monitoring applications ranging from environmental control to medicine. This paper shows principles and advantages of two miniaturized NIR/IR-spectrometers, based on different MEMS technologies. Small size, portability and cost efficiency as well as high accuracy and mechanical robustness make both spectrometers suitable for use in such applications. The paper depicts principles and advantages of both devices. Performance parameters and a selected application, the monitoring of biogas plants to raise their efficiency, are presented.